FB Grease Lubricated (Hybrid) Molecular Pump

Products

EVP offers three kinds of structure unique molecular vacuum pumps, mixed molecular pumps, turbo molecular pumps and grease to lubricate the mixing of molecular pumps.

Advantages:
1) high stability
2) it is easy to achieve high vacuum and no oil
3) the same advantages as the turbo pump

Application:
It can be widely used in the fields of photovoltaic, lighting, aerospace, semiconductor, energy, military industry, laser, household appliances, materials, automobile and so on.

Model

unit

FB-300

FB-650

FB-1300

FB-2000

High vacuum flange

mm

100CF

100ISO

150CF

160

ISO-K

200CF

200

ISO-K

250CF

250

ISO-K

Fore pipe flange

mm

25KF

40 KF

40 KF

50 KF

Pumping speed

L/s

300

650

1300

1800 / 2000

Compression ration

N2

>108

>109

>109

>108

H2

>1×103

>8×103

>1×104

>1×104

Ultimate pressure

Torr

>3×10-7

>2×10-6

<8×10-8

<5×10-7

<8×10-8

<5×10-8

<8×10-8

<5×10-8

Rotary Speed

rpm

30000

24000

24000

24000

Bearing

/

Grease lubricated ceramic bearing

Start-up time

min

<4

<5

<5

<5

Fore pump speed

L/s

2

4-8

8-15

8-15

Cooling

/

Air

Water

Water/air

Water/air

Cooling water

Temp.

/

≤20

≤20

≤20

Consum.

L/min

/

1

1

1

Mounting position

/

Any

Any

Any

Any

Weight

Kg

11

22

27

35